Javascript must be enabled to use this form.

UTDallas Research Explorer
 View Profile
    Faculty Profile — Is this you? Login to edit.Last Modified Time: 03:10:54 PM Thu, 6 May 2010 
Image of  Matthew John Goeckner
 Contact InformationHelpHelp  
Matthew John Goeckner
Professor and Program Head-Mechanical Eng, Professor-Electrical Engineering
Office MailstopMail Box: EC33, Room No.: EN2.918 
Email Address  goeckner@utdallas.edu    Primary Phone Number 972-883-4292    URL Profile Website    Media Contact
Administrative Assistant:  Help  
Owens, Joanne F
 Professional Preparation
HelpHelp  
 DegreeMajorInstitutionYear
 Post Doc Engineering Research Center for Plasma Aided Manufacturing1994
 Ph.D.PhysicsUniversity of Iowa1990
 M.S.PhysicsUniversity of California at Los Angeles1984
 B.S.PhysicsSouthern Illinois University1983
 B.S.MathematicsSouthern Illinois University1982
Collapse Section Expand Section Research and Expertise
HelpHelp  
Physical Science Related Research

Outside of life (plants and animals) I find process plasmas to be the most complex and intriguing systems observed on earth.  This complexity draws me to the subject. I want to develop a global understanding of the processes that make plasmas so useful and variable. All process plasmas are similar in that the plasma source, gas-phase species and surfaces interact to make the whole system.  Thus, I view all process plasmas as a continuum - plasmas used for etch are in many respects the same as plasmas used for deposition and those used for implantation.  Obviously this is an over simplification of the processes.  For example an inductively coupled etch plasma using Cl2 as the feed gas is clearly different than a capacitively coupled deposition plasma using silane.  However, there are some very similar aspects to both plasmas.  
I am particularly interested in plasma-surface interactions.  This is because these interactions make plasmas useful AND these interactions are little understood, even after 40+ years of research. On a technical level, one can explain the interactions as follows.  Often the plasma is created and sustained through an electric or electromagnetic heating of electrons.  A small fraction of the electrons gain sufficient energy to ionize the local neutral gas.  In addition, these energetic electrons will dissociate and heat, often indirectly, the neutral gas.  Eventually, the ions drop across an electric sheath to a surface that is in or which contains the plasma.  Neutrals, both the initial and daughter species, also diffuse to these same surfaces.  At this point, a wide number of chemical and physical processes can occur, with many of them occurring in combination.  This includes neutralization of the ions and subsequent reflection of energetic neutrals into the gas phase.  The neutrals may undergo chemical reactions which liberate new gas species, may sputter new species into the gas-phase may adsorb on the surface or may simply bounce off of the surface.  All of these processes depend on the type of surface, surface conditions and the make up of the gas impinging on the surface.  In most process plasmas the principal gas-phase molecules are those that have interacted with the system surfaces.  Because both the ion species and the electron energy distribution are determined in part by the gas-phase chemistry present in the system, we find a strong interaction between the plasma source, the gas-phase species and the surfaces.  I, and many others, have found significant evidence that this view of process plasmas is correct.  (Examples of this are given in my publications.)  
Such interactions will become more critical as we switch from the fairly simple chemistry used in semiconductor manufacturing to the chemistry needed for biomedical applications.  This switch will result in an order of magnitude increase in feed gases (from ~10 to ~100) with the biomedical gases being more complex (from ~1-4 carbons to 4-10 carbons) and thus producing more daughter species/radical pathways.
I study these interactions through both experimental investigation and analytical models.  Our analytical models have begun to provide insight into the surface processes.  The models are being further refined based on studies of the complex plasma chemistry. These chemical studies have been possible in large part due to a number of diagnostics that I have developed over the years. Primary amongst them is the use of Fourier transform infrared spectroscopy for the study of gas-phase chemistry in low-pressure, high-density plasmas.  In addition, I have developed two novel plasma sources in which I can readily change plasma heating (source), gas-phase chemistry and most importantly the conditions of plasma facing surfaces.  As such, I have developed experimental plasma systems that are almost as flexible as the computer simulations of process plasmas being developed elsewhere.

Engineering Education Related Research

Over the years, I have grown as a professor.  One of the most important elements to being a professor is the teaching of students.  As part of my desire to be a complete professor, I worked for 3 years as the chair of the EE department undergraduate curriculum committee.  (I also became an ABET evaluator.) We strove to understand why some of our students were failing while others were sailing through the same classes.  UTD has a wide variety of students, ranging from traditional to part time older students.  At first, we thought that the range of students we were teaching might be the issue then we looked at the classes we were teaching, in comparison to those being taught at other comparable universities.  All in all, we found no good reason for one group to fail while the other succeeded.  This led us to look closely at WHAT we were teaching in each course and how each course was related to the previous and the next.  In the end, we came up with a systematic approach to curriculum management.  After we used this technique, the average student grade (GPA) in the department increased approximately 0.2 (out of 4) and the withdraw rate dropped from 4% to 2%.  Needless to say, I was hooked.  I now find linkage of the program specific topics to real measures of student understanding a major interest.  I am convinced that we can use this to leave a lasting legacy of better engineers.  I am determined to prove this point in a rigorous fashion.

Teaching interests

I look at teaching as a multifold issue. First, I am paid to instruct students at UTD; second, I enjoy teaching; third, teaching is a wonderful opportunity to review old material or learn new material; finally, it is through teaching that I see a chance to leave a legacy to the next generation.
While I am paid to teach, I would not be a professor if I did not enjoy seeing students learn in fact this was why I left a very good industrial research position. I have strong desire to be an excellent teacher and I have tried to model my teaching style after some of the professors that I had as a student. An example of this would be Dwight Nicholson (U Iowa). At no point was his class simple he always pushed you to excel. However, despite the fact that he was busy as the department chair, Prof. Nicholson was always willing to help students who were stuck. (The other excellent professors I had had similar traits.) As such, I do a number of things. First, I push the students as hard as I reasonably can. (On average, I have found the UTD students to be highly motivated but slightly overworked, as many have full time jobs outside of school.) Second, while I have 'official' office hours, I tell my students that they are welcome to come for help any time between 8 and 5 and occasion this has been extended to nights and weekends for students with tight schedules. Many of them take advantage of this. Finally, in my class with Prof. Nicholson, I find that he insisted that I not only could 'do' homework problems but that I could understand and explain the physical picture that the equations described. I find that I am doing the same thing with my students. Finally I remember that he tried to make the class exciting. I try to do the same. Some day, I hope to be as good as an instructor as Prof. Nicholson.
In addition to my desire to be an excellent teacher, I have a desire to teach a broad variety of classes. Thus far I have taught, UG Mathematics II, UG Devices, Graduate Plasma Technology, Graduate Plasma Sciences, UG Electromagnetism I and II and Intro Fluids. I will soon add two more fluids courses to this list. Of these three, I have taught, UG Electromagnetism and the Graduate Plasma classes, on a repeated basis. I teach the plasma because it is core to my research  and allows me to review things. I teach Electromagnetism because I love it and there is a dearth of professors who are willing to teaching it. (I teach Fluids in Mechanical Engineering for the same reason.) In addition to these 'standard' courses, I have also taught a short course on "Learning, Teaching and Leading". I created this course to teach Boy Scouts in Troop 1000 in Plano, TX (T1000.org). I taught this to the leadership of the troop a number of times over the 5 years I worked with them. (I now work with the local Boy Scout district council.) I have since begun teaching it to the ME freshman classes at UTD. We are trying to determine how much this course might help all of the students and if it does we will try to teach it to all incoming students. In some sense, it is this latter short course that I expect to have the greatest impact  it will have changed a university and all of the students who attend it.

Service interests:

Like teaching, I look at service as a three-fold issue.  First, I am paid to serve on committees at UTD; second, I find great satisfaction in improving the university (and my research field) and third, service provides interactions with colleagues that I might not otherwise have and thus new ways of thinking.
Like teaching, I would not be a professor if I did not enjoy the service aspect.  To me service is all about leaving the world a better place then I found it.  (Teaching does the same thing!)  In most of my classes I give a little extra credit to students who go out and volunteer at a church, synagogue, mosque, food pantry, etc.  The requirement is that they give some of their time.  I want them to understand that being an engineer or scientist is really about making the world a better place.
As a professor at UTD I have been on many committees both departmental and university-wide. The one that I am most proud of is my work as the chair of the EE Undergraduate Curriculum Committee. I held that position from Jan 2006 to June of 2009. During that time, we tackled a number of issues important to the department. However the biggest thing that we have did was to produce a systematic method for control of the curriculum. With that system we have come up with approximately 200 fundamental concepts that cover all of the engineering/science courses needed for a BSEE. This systematic method lies between course level program development and "just in time" program development. (It is in fact a "systems engineering" solution to engineering education.) These fundamental concepts are all held within a single "fundamentals" chart which shows where those concepts are taught, which other classes they are used in and which courses are pre-requisites. At first, it was very difficult to get the other faculty to buy into all of the necessary work (try herding cats) however, as we progressed they have begun to view it with pride. The "fundamentals" chart is also known as the "Eye" chart as it takes an E-sized sheet of architectural paper to print and then in small print.  We, the faculty, now know what we teach and how it is linked. I have used this same technique to create a map for our new Mechanical Engineering program and from this laid out the four year course sequence and timing. (In effect, I have created most of the fundamental infrastructure needed for the new department.)  We, in ME, are now working to improve that original map.  We expect great things. In addition, we are also using these maps in both EE and ME to help our students understand the big picture which should make them better engineers. I believe that this method has the potential to revolutionize education in the US.
In addition to my service at UTD, I am also involved in service off campus. I have done all of the standard service items including: reviewing papers, reviewing proposals, serving on society/conference executive committees (this includes AVS, GEC and new workshop series on flexible electronics that I am setting up). In each of these, I have helped to make my own field stronger and I have learned from the interactions. However, like university level committees, I have one in which I am most proud; That one was that until recently I regularly worked with a local boy scout troop which has about 100 scouts in it. Those strong interactions lasted over 5 years  with me working an average of 4 to 5 hours per week with the troop. (Recently, I reluctantly had to reduce my participation because of other time pressures.) My primary job with the troop was that of scribe coach for the scouts  but I also worked to help the scouts learn how to learn and from that how to teach and how to study. (In fact I put together a 4-hour class for them on the subject.) I also talked to many of them about what they wanted to do with their future. I have seen many of them go on to become successful college students. This gives me a great sense of accomplishment. In addition, I am trying to use some the things that I developed to teach the scouts to help professors at UTD become better teachers. This improvement in life and the future is why I enjoy service activities.

Collapse Section Expand Section Publications
HelpHelp  
 2 3 4 Next>> 15>>  
  YearPublication  Type
In Prep.
Introduction to electromagnetism for engineering and physical sciences
Book
2010
A.K. Jindal, L.J. Overzet, and M. J. Goeckner Controllable optical emission spectroscopy diagnostic system for analysis of process chemistriesTime Resolved Microwave Interferometry Measurement of the Electron Density in a Pulsed 1,3-Butadiene Discharge. Plasma Chemistry and Plasma Process, DOI 10.1007/s11090-010-9213-z (2010).
Category: Plasma Chemistry and Plasma Process
Peer reviewed
2010
P.L.S. Thamban, J. Hosch, and M. J. Goeckner. Controllable optical emission spectroscopy diagnostic system for analysis of process chemistries. Review Of Scientific Instruments 81, 013502 (2010).
Category: Review Of Scientific Instruments
Peer reviewed
2009
M. J. Goeckner, D. Ogawa, I. Saraf and L. J. Overzet Progress report: Direct injection of liquids into low-pressure plasmas. Second International Workshop On Non-Equilibrium Processes In Plasmas And Environmental Science - Journal Of Physics: Conference Series 162, 12014-12014 (2009).
Category: Journal of Physics
Peer reviewed
2009
S. P. Sant, C. T. Nelson, L. J. Overzet and M. J. Goeckner. Relationship Between Gas-Phase Chemistries And Surface Processes In Fluorocarbon Etch Plasmas: A Process Rate Model. Journal of Vacuum Science and Technology A 27, 631-642 (2009).
Category: Journal of Vacuum Science and Technology
Peer reviewed
Collapse Section Expand Section Presentations and Projects
HelpHelp  
  1  2 3 4 5 6 
Start DateEnd DatePresentation/Project
11/14/2004 11/19/2004 Invited Talk: Unraveling the complex process known as 'plasma chemistry'.

Invited Paper PS1-MoA3
American Vacuum Society 51st International Symposium, Anaheim CA, Nov 14-19, 2004 

10/25/1999 10/29/1999 Invited Talk: Plasma Doping for Shallow Junctions
SB Felch MJ Goeckner Z Fang, Gc-F Yeap D. Bang M-R Lin

American Vacuum Society, 46th International Symposium, Seattle WA Oct 25-29,1999
10/21/1999  Invited Talk: Evaluation of Tests to Examine Charging Damage in Ion Implantation and Plasma Processes
M.J. Goeckner (invited) S.B. Felch, J. Weeman, and J. Erhardt

National Ion Implant Users Group meeting, Austin TX, Oct. 21, 1999.
10/06/1995  Invited Talk: Fourier Transform Infrared Spectroscopy in processing plasmas
Swarthmore, Department of Physics and Astronomy Colloquim, Oct 6, 1995. 
08/25/2008 08/29/2008 Invited Talk: Plasma Surface interactions
M.J. Goeckner, CT Nelson, SP Sant, AK Jindal, EA Joseph, BS Zhou, G Pardon-Wells, B Jarvis, R Pierce and LJ Overzet

24th Symposium on the Physics of Ionized Gases, Novi Sad, Serbia, August 25-29, 2008
Collapse Section Expand Section Affiliations
HelpHelp  
A list of persons who have collaborated on a project or a book, article, report or paper
UTD: L.J. Overzet, J Sibert, R Hilborn, G Burnham, C Ledbetter, JB Lee, G Lee, M Rotea, M Spong, M Dabkowski, V Ramakrishna, W Krawcewicz, Richland College (Dallas CC): M Hogan, B Donham; Collin County Comm. College: D Gaily;
Graduate students and postdoctoral scholars sponsored
MSEE: Jeremy Marquis (02), Yu Lei (02), Keith Jarreau (02), Sanket Sant (03),
Ashish Jindal (04), Caleb Nelson (06) Daisuke Ogawa (08)
MSEE Pending: David Urrabazo
Ph.D.: Baosou Zhou (04), Eric Joseph (05), Sanket Sant (06), Yonghua Liu (06), Ashish Jindal (07)
Ph.D. Pending: Caleb Nelson, Gabriel Padron-Wells, Cristina Estrada, Iqbal Sharif, Diasuke Ogawa
PostDoc: Stephan Thamban (07-)
Collapse Section Expand Section Appointments
HelpHelp  
DurationRankDepartment / SchoolCollege / OfficeUniversity / Company
2010-PresentAffiliated ProfessorPhysicsSchool of Natural Science and MathematicsUniversity of Texas at Dallas
2009-PresentAssociate HeadMechanical EngineeringErik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
2008-PresentProfessorMechanical EngineeringErik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
2008-2009Interim HeadMechanical EngineeringErik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
2008-PresentProfessorElectrical EngineeringErik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
2008-PresentAffiliate ProfessorMaterial Science and EngineeringErik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
2006-PresentAffiliate ProfessorScience & Math EducationSchool of Natural Science and MathematicsUniversity of Texas at Dallas
2006-2007Consulting  Subsurface Consultants (Maute)
1999-2008Associate Professor (tenure 02)Electrical EngineeringErik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
1998-1999Research Scientist  Varian Research Center
1997Consulting  Princeton Textile Resaerch Institute
1994-1997Research PhysicistPlasma Physics Lab Princeton University
1991-1994Research AssociateEngineering Research Center for Plasma Aided Manufacturing University of Wisconsin
1991-1992Research AssociatePhysics Department University of Iowa
1986-1990Research AssistantPhysics Department University of Iowa
1985-1986Research AssistantPhysics Department UCLA
1983-1985Teaching AssistantPhysics Department UCLA
1982-1983Teaching AssistantPhysics Department Southern Illinois University
1982Teaching AssistantMath Department Southern Illinois University
 Synergistic Activities
HelpHelp  
Synergistic Activities
  • Chair Elect - American Vacuum Society - PSDT (09-10)
  • Member 5xME workshop. Implementing the Recommendations of the 5xME Workshop (http://umich.edu/~ulsoy/5XME.htm)
  • Texas Deans' K-12 Task Force on High School Curriculum Working Group (09- )
  • Member The Higher Education Coordinating board (Texas) "2 + 2" Mechanical Engineering Committee (09 - )
  • Member UTD "Gateways to Excellence in Math and Science" Committee (08- )

 Support
HelpHelp  
 DurationTitleSponsorAmountStatus
03/01/11-02/29/16NSF Engineering Research Center for Offshore Wind EnergyUniversity of Houston/NSF Pending
08/01/10-07/31/15PRISM: A Motivated Approach to Mathematics Via EngineeringNational Science Foundation2,539,215Pending
08/01/2009-07/31/12MRI: Development of a Controllable optical emission spectroscopy diagnostic system for use in atomic and molecular sciencesNational Science Foundation$481,150Current
01/01/11-12/31/12Collaborative Research: Development of the Next Generation Mechanical Engineering CurriculumNational Science Foundation100,000Pending
08/01/09-07/31/12Student exchange program with PLANT Research center at Nagoya UniversityNagoya University (Japan) Current
08/01/09-07/31/12Micro misted PlasmasDepartment of Energy399,00Current
08/01/09-07/31/12Dallas STEM Gateways CollaborativeNational Science Foundation2,496,008Current
06/01/10-05/31/11Flexible Electronics: Fundamentals of processingSKK University (Korea)160,000Pending
08/01/08-07/31/112008 SRC Custom Research Proposal: Fundamentals of Deep Silicon EtchSemiconductor Research Corporation165,000Current
05/01/10-11/01/10Low-cost, Conductive, Corrosion-resistant Coating for Stainless SteelNational Science Foundation50,310Pending
08/01/09-07/31/10Development of a Plasma ExciterVerity Instruments64,323Current
06/01/08-06/01/10(GIFT) Understanding plasma-wall interactions in higher frequency Capacitively Coupled (CC) etch plasmasAMAT74,800 (GIFTCurrent
 News Articles
Lauded Professor Says Teaching Takes Skill and Perserverence
News Center at UT Dallas

That was in 1999. Today, however, overwhelmingly positive recommendations from Goeckner’s students have earned him the President’s Outstanding Teaching Award for the 2011-2012 academic year. Goeckner received the award, one of the University’s highest accolades for faculty, at a recent convocation.
 
Goeckner earned undergraduate degrees in mathematics and physics from Southern Illinois University and his PhD in plasma physics from the University of Iowa. At UT Dallas he also is a professor of mechanical engineering and of electrical engineering, and is an affiliate professor in the departments of Physics, Materials Science and Engineering, and Science and Mathematics Education. In addition, he has served as interim and associate head of mechanical engineering.

Interim Chair of Mechanical Engineering Named
UT Dallas News Center
Matthew Goeckner has been named interim chair of the new UT Dallas Department of Mechanical Engineering, which is expected to enroll 700 students within just a few years.
 
“The importance of Matt’s service as interim chair at the critical formative stage of the department cannot be overestimated,” said Mark Spong, dean of the Jonsson School of Engineering and Computer Science at UT Dallas and holder of the Lars Magnus Ericsson Chair. “Enrollment in mechanical engineering is already significant and growing rapidly, and I am grateful that Matt has enthusiastically agreed to take on the demanding tasks required to begin a new department. I know his considerable expertise in teaching and research will serve well in this role.” 
 
Last year the Jonsson School doubled its number of academic departments when two new ones – Materials Science and Engineering, and Mechanical Engineering – joined the long-standing departments of Computer Science and Electrical Engineering.

Teachers from Years Past Still Inspire Honored Math Professor
UT Dallas News Center
When it comes to teaching, Dr. Matthew Goeckner draws on  inspiration from his past in making the learning experience joyful and fulfilling for UT Dallas students.
 
Goeckner, head of the Mathematical Sciences Department, was rewarded for his efforts by The University of Texas System, which chose him as one of five UT Dallas faculty members to receive the 2013 Regents’ Outstanding Teaching Award.
 
The annual award honors excellence in the classroom among universities throughout the UT System.
 
Growing up in the small town of Macomb, Ill., Goeckner said he had stellar high school teachers who encouraged him and sparked his desire to learn more.
 
“Even though I felt like I was in the middle of nowhere, I had teachers devoted to making the most out of the classroom experience,” he said. “It’s been more than 30 years since then, and I still remember their names – Mr. Helms and Mr. Van Blake.”

       Teaching HelpHelp  
toggle toggle Patents
HelpHelp  
Patents Issued
  1. Ziwei Fang and Matthew J. Goeckner, Dose monitor for plasma doping system. US Patent number: US6528805. Issued: 2003
  2. Matthew J. Goeckner and Ziwei Fang, Hollow cathode for plasma doping system. US Patent number: US6500496. Issued: Dec. 31, 2002. Filed: Oct. 25, 2000
  3. Matthew J. Goeckner and Charles E. Van Wagoner, Method and apparatus for eliminating displacement current from current measurements in a plasma processing system. US Patent number: US6433553. World Intellectual Property Organization number: WO0131681. Issued: Aug. 13, 2002. Filed: Oct. 27, 1999
  4. Matthew J. Goeckner and Ziwei Fang, Method and apparatus for low voltage plasma doping using dual pulses. US Patent number: US6335536. World Intellectual Property Organization number: WO0131682. Issued: Jan. 1, 2002. Filed: Oct. 27, 1999
  5. Ziwei Fang and Matthew J. Goeckner, Dose monitor for plasma doping system. US Patent number US6300643. World Intellectual Property Organization number: WO0141183. Issued: Oct. 9, 2001. Filed: Dec. 6, 1999
  6. Matthew J. Goeckner and Ziwei Fang, Hollow cathode for plasma doping system. US Patent number: US6182604. World Intellectual Property Organization number: WO0131683. Issued: Feb. 6, 2001. Filed: Oct. 27, 1999
  7. Reuel B. Liebert, Bjorn O. Pedersen, and Matthew J. Goeckner, Dose monitor for plasma doping system. US Patent number: US6020592. World Intellectual Property Organization number: WO0008670. Issued: Feb. 1, 2000. Filed: Aug. 3, 1998

Unrefereed abstracts and/or oral presentations at professional meetings

1    J. Goree and M.J. Goeckner
Laser-induced fluorescence measurements of ion temperature in multidipole plasmas,
American Physical Society - Division of Plasma Physics, San Diego, CA, Oct./Nov. 1987 Bulletin of the American Physical Society 32, 1941 (1987)

2    M.J. Goeckner and J. Goree
Laser-induced fluorescence measurement of plasma ion distribution functions: corrections for power saturation,
American Vacuum Society 35th National Symposium, Atlanta, GA, Oct. 1988

3    M.J. Goeckner and J. Goree
Laser-induced fluorescence measurement of plasma ion distribution functions: correcting for spatially inhomogeneous laser intensities,
Fourth International Laser Science Conference, Atlanta, GA, Oct. 1988
Bulletin of the American Physical Society 33, 1658 (1988)

4    M.J. Goeckner and J. Goree
Pulsed laser fluorescence measurement of ion distribution functions: avoiding saturation broadening,
American Physical Society - Division of Plasma Physics, Hollywood, FL, Nov. 1988
Bulletin of the American Physical Society 33, 2052 (1988)

5    M.J. Goeckner, J. Goree and T.E. Sheridan
Laser-induced fluorescence characterization of ions in a magnetron plasma,
American Vacuum Society 36th National Symposium, Boston, MA, Oct. 1989

6    T.E. Sheridan M.J. Goeckner and J. Goree
Ion limited transport in magnetron plasmas,
American Vacuum Society 36th National Symposium, Boston, MA, Oct. 1989

7    J.E. Miranda, M.J. Goeckner, J. Goree and T.E. Sheridan
Ionization distributions in a magnetron plasma,
American Vacuum Society 36th National Symposium, Boston, MA, Oct. 1989

8    M.J. Goeckner, J. Goree and T.E. Sheridan
LIF and probe characterization of sputtering magnetron discharges,
American Physical Society - Division of Plasma Physics, Anaheim, CA, Nov. 1989
Bulletin of the American Physical Society 34, 2029 (1989)

9    J. Goree, M.J. Goeckner and T.E. Sheridan
Sputtering magnetron discharges,
American Physical Society - Division of Plasma Physics, Anaheim, CA, Nov. 1989
Bulletin of the American Physical Society 34, 2029 (1989)

10    T.E. Sheridan, M.J. Goeckner and J. Goree
Monte carlo simulation of sputtering magnetron discharges,
American Physical Society - Division of Plasma Physics, Anaheim, CA, Nov. 1989
Bulletin of the American Physical Society 34, 2029 (1989)

11    M.J. Goeckner, J. Goree and T.E. Sheridan
LIF characterization of a dc multidipole discharge,
Gaseous Electronics Conference, Champaign, IL, Oct. 1990
Bulletin of the American Physical Society 36, 215 (1991)

12    J. Goree, M.J. Goeckner and T.E. Sheridan
Magnetron plasma transport simulation,
Gaseous Electronics Conference, Champaign, IL, Oct. 1990
Bulletin of the American Physical Society 36, 199 (1991)

13    M.J. Goeckner, J. Goree and T.E. Sheridan
Monte Carlo simulation of ions in a magnetron plasma,
American Vacuum Society 37th National Symposium, Toronto, Canada, Oct. 1990

14    J. Goree, M.J. Goeckner, T.E. Sheridan,
Sputtering magnetron experiments and modeling
IEEE International Conference on Plasma Sciences (ICOPS), 1990. p. 202.

15    T.E. Sheridan, M.J. Goeckner and J. Goree
Observation of two-temperature electrons in a sputtering magnetron plasma,
American Vacuum Society 37th National Symposium, Toronto, Canada, Oct. 1990

16    M.J. Goeckner, J. Goree and T.E. Sheridan
LIF characterization of a multidipole filament discharge,
American Physical Society - Division of Plasma Physics, Cincinnati, OH, Nov. 1990
Bulletin of the American Physical Society 35, 2016 (1990)

17    T.E. Sheridan, M.J. Goeckner and J. Goree
Planar probe characterization of a sputtering magnetron plasma,
American Physical Society - Division of Plasma Physics, Cincinnati, OH, Nov. 1990
Bulletin of the American Physical Society 35, 2016 (1990)

18    M.J. Goeckner, J.A Meyer, G-H. Kim, J.S. Jenq, A. Matthews and R.A. Breun
The influence of contaminates during the seasoning of an ECR etcher,
American Vacuum Society 39th National Symposium, Chicago, IL, Oct. 1992

19    D. Beale, A. Wendt and M.J. Goeckner
Spatially resolved optical emission of a methyl methacrylate deposition,
American Vacuum Society 39th National Symposium, Chicago, IL, Oct. 1992

20    M.J. Goeckner, Shamim M. Malik, J.R. Conrad and R.A. Breun
Laser-induced fluorescence measurement of ion dynamics of a pulsed plasma sheath,
International Workshop on Plasma-Based Ion Implantation, Madison, WI, Aug. 1993

21    M.J. Goeckner, Shamim M. Malik, J.R. Conrad and R.A. Breun
LIF measurement of the dynamics of pulsed planar sheaths,
American Physical Society - Division of Plasma Physics, St. Louis, MO, Oct. 1993
Bulletin of the American Physical Society 38, 1890 (1993)

22    R. Breun, M. Goeckner, J. Meyer, G.H. Kim, R.P. Harvey, N. Hershkowitz, N. Hitchon,
Characterization of an ECR etching plasma with a microwave interferometer, Langmuir probes and a FTIR
IEEE International Conference on Plasma Sciences (ICOPS), Vancouver, BC, Canada, June 1993, p. 141.

23    L.J. Mahoney, S.G. Yulke, J.L Shohet, and M.J. Goeckner
FTIR spectroscopy measurements of CF4 And C2F6 concentrations in a planar rf inductively-coupled plasma,
IEEE International Conference on Plasma Science (ICOPS), Santa Fe, NM, June 1994, p 109.

24    J.H. Booske, L. Zhang, R.F. Cooper, J.L. Shohet, K. Shenai, D. Dallman, M.J. Goeckner, R Breun, W.N.G. Hitchon, E.B. Wicksberg, R. Speth, J.R. Jacobs and G. Was
Buried ceramic layer in glass and silicon using plasma source ion implantation,
IEEE International Conference on Plasma Science, Santa Fe, NM, June 1994, p 166.

25    S.A. Cohen, T. Bennett, D. Carroll, T.K. Chu, M.J. Goeckner, P. Lucas, J Park and Z. Wang
An undergraduate laboratory course taught in the concentrated-study format,
American Physical Society - Division of Plasma Physics, Louisville, KY, Nov. 1995
Bulletin of the American Physical Society 40, 1689 (1995)

26    M.J. Goeckner and S.A. Cohen
A plasma-based source of hyperthermal neutral atoms,
American Physical Society - Division of Plasma Physics, Louisville, KY, Nov. 1995
Bulletin of the American Physical Society 40, 1773 (1995)

27    M.J. Goeckner, J Park, T.K. Bennett and S.A. Cohen
Ashing of photoresist with a plasma-based source of hyperthermal neutral atoms,
American Vacuum Society 43rd National Symposium, Philadelphia, PA, Oct. 1996

28    Z.H. Wang M.J. Goeckner and S.A. Cohen
Development and measurement of hyperthermal neutral beams,
American Vacuum Society 43rd National Symposium, Philadelphia, PA, Oct. 1996

29    J Park, T.K. Bennett, M.J. Goeckner and S.A. Cohen
Formation of a steep electron temperature gradient and radiation zone in a high density linear plasma device,
American Vacuum Society 43rd National Symposium, Philadelphia, PA, Oct. 1996

30    S.A. Cohen, Jaeyoung Park, T. Bennett and M.J. Goeckner
Particle and heat transport on thermally collapsed plasmas in a linear divertor simulator,
American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996
Bulletin of the American Physical Society 41, (1996)

31    Jaeyoung Park, S.A. Cohen, T. Bennett and M.J. Goeckner
Studies of emission spectroscopy on thermally collapsed plasmas in a linear divertor simulator,
American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996
Bulletin of the American Physical Society 41, (1996)

32    Z.H. Wang, S.A. Cohen and M.J. Goeckner
Detection of hyperthermal neutral beams,
American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996
Bulletin of the American Physical Society 41, (1996)

33    M.J. Goeckner, Jaeyoung Park, T.K. Bennett, Z. Wang and S.A. Cohen
Characterization of a plasma-based source of hyperthermal neutrals,
American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996
Bulletin of the American Physical Society 41, (1996)

34    Zhehui Wang, S. A. Cohen and M. J. Goeckner
Measurements of velocities of energetic neutral atoms in a dc magnetron,
American Physical Society - Division of Plasma Physics, Pittsburgh, PA, Nov. 1997
Bulletin of the American Physical Society 42, (1997)

35    Ce Li, S. A. Cohen and M. J. Goeckner
Ashing of photoresist with a plasma-based source of hyperthermal neutral atoms,
American Physical Society - Division of Plasma Physics, Pittsburgh, PA, Nov. 1997
Bulletin of the American Physical Society 42, (1997)

36    M.J. Goeckner, T.K. Bennett, S.A. Cohen and J. Park
Plasma characteristics in a surface-neutralization-based neutral beam,
American Vacuum Society 44th National Symposium, San Jose, CA, Oct. 1997

37    D. Lenoble, M.J. Goeckner, S.B. Felch, J. Galvier and A. Grouillet
Evaluation of plasma doping for sub-0.18 ­- devices,


12th International Conference on Ion implantation Technology '98, Kyoto, JP, June 1998

38    M.J. Goeckner, S.B. Felch, J. Weeman, S. Mehta and J.S. Reedholm
Evaluation of charging damage test structures for ion implantation processes,
American Vacuum Society 45th National Symposium, Baltimore, MD, on November 2-6, 1998.

39    S. Felch, A. Oberhofer, M. Goeckner, V. Chia, M. Poulakos, W. A. Keenan, and B. Gordon
Electrical profiling of ultra-shallow junctions,
Fifth International Workshop on the Measurement, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, Research Triangle Park, NC, on March 28-31, 1999.

40    S.B. Felch, M.J. Goeckner, Z. Fang, D. Lenoble, J. Galvier, A. Grouillet, G.C-F. Yeap, D. Bang, M-R. Lin
Plasma doping for shallow junctions,
1st International Conference on Advanced Materials and Processes for Microelectronics, San Jose, CA, on March 15-19, 1999.

41    M.J. Goeckner, S.B. Felch, J. Weeman, and J. Erhardt,
Evaluation of tests to examine charging damage in ion implantation and plasma processes: using controlled stress environments,
Proceedings of the 2000 International Conference on Ion Implantation Technology, Alpbach, Austria, Sept. 17-22, 2000

42    M.J. Goeckner, J.M. Marquis, B.J. Markham and A.K. Jindal,
A modified gaseous electronics conference reference cell for the study of plasma-surface-gas interactions,
Gaseous Electronics Conference, Houston, TX October 24-27, 2000
Bulletin of the American Physical Society 45 (2000).

43    A.K. Jindal, J.M. Marquis, B.J. Markham and M.J. Goeckner,
A flexible plasma system for the study of plasma-surface-gas interactions,
Gaseous Electronics Conference, Houston, TX October 24-27, 2000
Bulletin of the American Physical Society 45 (2000).

44    J.M. Marquis, S. Srinivasan, M.H. Khater, L.J. Overzet and M.J. Goeckner,
Inductively coupled plasma source symmetry in the presence of a current node,
Gaseous Electronics Conference, Houston, TX October 24-27, 2000
Bulletin of the American Physical Society 45 (2000).

45    E.A. Joseph, S.P. Sant, L.J. Overzet, M. Goeckner and M.J. Kushner,
Investigation and Modeling of Plasma-Wall Interactions in Inductively Coupled Fluorocarbon Plasmas and the Effects of Chamber Dimension
American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 - Nov 2, 2001.

46    A.K. Jindal, S.K. Kanakasabapathy, M.J. Goeckner and L.J. Overzet,
A Novel Approach to Time Resolved Langmuir Probe Measurements
American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 - Nov 2, 2001.

47    S. Srinivasan, L.J. Overzet and M.J. Goeckner
ICP Source Designs with Azimuthal Field Symmetry Despite a Current Node
American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 - Nov 2, 2001.

48    L.J. Pratti, J.M. Marquis, M. Goeckner and L.J. Overzet,
Scalability of Innovative ICP Source Geometries
American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 - Nov 2, 2001.

49    Y. Lei, E.A. Oakes, M. Goeckner, S.B. Felch, Z. Fang and B.-W. Koo,
Study of Pulsed Plasma Doping by Experimental Diagnostics and HPEM Simulations
American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 - Nov 2, 2001.

50    S. Srinivasan, L. Pratti, L. Overzet, M.J. Goeckner
Current Nodes on Inductively Coupled Plasma Sources
Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002.
Bull. American Phys. Soc. 47, No. 7, page 45, 2002.

51    Ashish Jindal, M.J. Goeckner, L.J. Overzet
FTIR Analysis of Etch Products in Ion-Ion and Electron-Ion Cl2 Discharges
Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002.
Bull. American Phys. Soc. 47, No. 7, page 21, 2002.

52    M.J. Goeckner, E.A. Joseph, Y. Liu, L.J. Overzet, S. Sant, B. Zhou
The modified Gaseous Electronics Conference (mGEC) research reactor
Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002.
Bull. American Phys. Soc. 47, No. 7, page 19, 2002.

53    Yu Lei, L.J. Overzet, S.B. Felch, Ziwei Fang, B.-W. Koo, M.J. Goeckner,
Langmuir probe diagnostics of pulsed plasma doping system
Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002.
Bull. American Phys. Soc. 47, No. 7, page 42, 2002.

54    B. Zhou, E.A. Joseph, Y. Liu, L.J. Overzet, M.J. Goeckner
Studies of plasma chemistry in a modified Gaseous Electronics Conference (mGEC) research reactor
Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002.
Bull. American Phys. Soc. 47, No. 7, page 19, 2002.

55    S. Sant, E.A. Joseph, Y. Liu, L.J. Overzet, B. Zhou, M.J. Goeckner
Simulation of plasma chemistry in a modified Gaseous Electronics Conference (mGEC) research reactor
Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002.
Bull. American Phys. Soc. 47, No. 7, page 19, 2002.

56    A.K. Jindal, A.J. Prengler, L.J. Overzet, M.J. Goeckner,
Analysis of Downstream Etch Chemistry in Ion-Ion and Electron-Ion Cl2 Discharges,
American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003
AVS Technical Program, page 83.

57    S.P.Sant, E.A. Joseph, Y. Liu, B. Zhou, L.J. Overzet and M.J. Goeckner
Influence of chamber geometry on electronegative and electropositive plasmas.
Indian National Plasma Symposium" BIT Ranchi, India, 7 -12 Dec. 12, 2003.

58    E.A. Joseph, L.J. Overzet, M.J. Goeckner, D.S. Park, M.Tinker and J.B. Lee,
Optical Characterization of Poly-Dimethyl Siloxane (PDMS) during Inductively Coupled Plasma Processing for Implementation in a PDMS-based Photonic Crystal,
American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003
AVS Technical Program, page 90.

59    B. Zhou, E.A. Joseph, S.P. Sant, L.J. Overzet and M.J. Goeckner,
Study Of The Gas Phase Fluorocarbon Chemistries In A Modified Gaseous Electronics Conference Plasma Reactor Using Fourier Transform Infrared Spectroscopy And Ellipometry,
American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003
AVS Technical Program, page 152.

60    E.A. Joseph, B. Zhou, S.P. Sant, L.J. Overzet, M.J. Goeckner and B.E. Gnade
The Role of Chamber Dimension in Fluorocarbon Etchng of SiO2 and its Effects on Gas and Surface-Phase Chemistry,
American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003
AVS Technical Program, page 152.

61    E. A. Joseph, B. Zhou, S. P. Sant, M. J. Goeckner and L. J. Overzet,
Characterization of Fluorocarbon Plasma-Surface Interactions Using in-situ Fourier Transform Infrared Spectroscopy and in-situ Spectroscopic Ellipsometry.
 5th International Workshop on Fluorocarbon Plasmas, Col de Porte 38700 Sarcenas - France, March 8-12 (2004).

62    E. A. Joseph, M. J. Goeckner and L. J. Overzet, D.S. Park, M. Tinker and J.B. Lee, D. Gidley, B. E. E. Kastenmeier
Characterization of Plasma-Substrate Interactions as a Function of Feedgas Composition Using In-Situ Spectroscopic Ellipsometry,
5th International Workshop on Fluorocarbon Plasmas, Col de Porte 38700 Sarcenas - France, March 8-12 (2004).

63    E. A. Joseph, M. J. Goeckner, L. J. Overzet, D. Gidley, and B. E. E. Kastenmeier,
Correlation of Nano-Pore Structure to Integration Issues for Low-k Interconnects.
UTD's January Graduate Student Presentations, Jan 12 (2004).

64    A.K. Jindal, A.J. Prengler, J.R. Frautschi, L.J. Overzet, M.J. Goeckner,
In-Situ FTIR Characterization of Gas Phase Chemistry in Continuous and Pulsed Inductively Coupled 1,3-Butadiene Discharges in a Gec Cell, Cross-Correlated
Paper PS-MoP8
American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

65    B.S. Zhou, E.A. Joseph, S.P. Sant, L.J. Overzet, and M.J. Goeckner,
Spectroscopic Study of Effect of Wall Conditions on Gas Phase and Surface Phase Chemistries in Inductively Coupled Fluorocarbon Plasmas
Paper PS-TuP3
American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

66    E.A. Joseph, M.J. Goeckner, L.J. Overzet, D.W. Gidley, and B.E.E. Kastenmeier
The Effects of Pore Morphology on the Diffusive Properties of a Porous Low-K Dielectric
Paper PS1-MoM5
American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

67    S.P. Sant, E.A. Joseph, B.S. Zhou, L.J. Overzet, M.J. Goeckner
Langmuir Probe Measurements of Change in Plasma Parameters with Change in Chamber Geometry in Electronegative Plasmas
Paper PS2-WeM1
American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

68    E.A. Joseph, M.J. Goeckner, L.J. Overzet, D.W. Gidley H.G. Peng B.E.E. Kastenmeier,
Reducing Fluorine in-diffusion during CF4 plasma processing of porous low-k dielectrics
15th International Colloquium on Plasma Processes (CIP 05) Grenoble, France, June 2005

69    Y. Liu, L.J. Overzet, M.J. Goeckner
Low temperature Al Atomic layer deposition using Methyl prollidiene Alane
American Vacuum Society International Topical Conference on Atomic Layer Deposition, San Jose CA, August 2005

70    A.K. Jindal, L.J. Overzet, M.J. Goeckner
FTIR characterization of the gas phase chemistry in pulsed 1,3-butadiene discharges in a Gaseous Electronics Conference (GEC) Cell
Paper: DM2.00002
58th Gaseous Electronics Conference, San Jose, CA, October 2005

71    S.P. Sant, E.A. Joseph, B.S. Zhou, L.J. Overzet, M.J. Goeckner,
Influence of chamber scaling on different level polymerizing processing gases
Paper: DM2.00003
58th Gaseous Electronics Conference, San Jose, CA, October 2005

72    MJ Goeckner, D Ogawa, R Timmons, LJ Overzet and S Sanchez
(Direct injection of liquids into low pressure plasmas
Paper: FPT1.00005
59th Gaseous Electronics Conference, Columbus, OH, October 2006

73    C Nelson, SP Sant, LJ Overzet and MJ Goeckner(
Influence of Ion Flux, Ion Energy, Fluorine Availability, and Surface Temperatures on SiO2 Etch Rates in FC Plasmas
Paper: VF1.00002
59th Gaseous Electronics Conference, Columbus, OH, October 2006

74    MJ Goeckner, AK Jindal and LJ Overzet(
in-situ FTIR characterization of the plasma chemistry as functions of the plasma duty cycle and peak power in a 1,3-butadiene discharge in an inductively coupled Gaseous Electronics Conference (GEC) Cell.
Paper: FPT2.00018
59th Gaseous Electronics Conference, Columbus, OH, October 2006

75    L. Tao, S. Ramachandran, C. T. Nelson, T. H. Lee, L. J. Overzet, M. J. Goeckner, M. J. Kim, G. S. Lee and W. Hu,
Nanofabrication of Diamond-like Carbon Templates for Nanoimprint Lithography,
Materials Research Society (MRS) Fall meeting, J13.4, Boston MA, Nov. 27-Dec. 1, 2006.

76    S. Ramachandran, L. Tao, T.H. Lee, L. J. Overzet, M. J. Kim, M. J. Goeckner, G. S. Lee, and W. Hu, "Diamond-Like-Carbon Coating on Nanoimprint Templates to Increase Wear Resistance", 50th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), May 2006.

77    Krutarth Trivedi, Caleb Nelson, Li Tao, Mathew Goeckner, Walter Hu, "High-density organic light emitting diodes by nanoimprint technology", International conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2007, Denver, CO.

78    L. Tao, C. T. Nelson, K. Trivedi, S. Ramachandran, M. Goeckner, L. Overzet, and Walter Hu, "Sub-50 nm scratch-proof DLC molds for reversal nanoimprint lithography", International conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) May 2007, Denver, CO.

79    M.J. Goeckner, G. Pardon-Wells, B Jarvis, A,K. Jindal
Controling gas chemistry in process tools for control of surface processes,
Proceedings of the 5th International Symposium on Advanced Plasma Processes and Diagnostics, Suwon, Korea, April. 6-7, 2007
Note the final 3 authors were accidentally dropped from the final manuscript by the publisher

80    M. Mandra, R. Dussart, J.-B. Lee, M.J. Goeckner, T. Dufour, P. Lefaucheux, P. Ranson, L. Overzet
Fabrication process and electrical characterization of direct current parallel micro-discharges in helium,
Paper: FTP1.00008
60th Gaseous Electronics Conference, Arlington, VA, October 2007

81    D. Ogawa(, M. Goeckner, A. Sra, R. Timmons(, L. Overzet
Direct liquid droplet injection for PECVD,
Paper: SRP1.00008
60th Gaseous Electronics Conference, Arlington, VA, October 2007

82    I. Saraf, M. Goeckner(, L. Overzet
Modeling the direct injection of liquid droplets into low-pressure environments and plasmas,
Paper: SRP1.00009
60th Gaseous Electronics Conference, Arlington, VA, October 2007

83    S. Ramachandran, L. Overzet, W. Hu(, L.S.N. Tao, G.-S. Lee, C. Nelson(, M. Goeckner
Comparison of gas-phase chemistry during deposition of amorphous carbon films using capacitive and inductive discharges,
Paper: ET1.00006
60th Gaseous Electronics Conference, Arlington, VA, October 2007

84    L. Tao, C. Nelson, S. Ramachandran, L. Overzet, M. Goeckner, G.S. Lee, and W. Hu,  
Stability of nanostructured DLC molds for nanoimprint lithography,
Materials Research Society (MRS) Fall meeting, Boston, Nov. 2007.

85    M.J. Goeckner.
The fundamentals of surface deposition and etch for flexible materials.
2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, December 3, 2007

86    Gabriel Padron-Wells, Brandon Jarvis and M.J. Goeckner
Development of films for bio-compatible electronics
2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, December 3, 2007

87    D. Ogawa, I. Saraf, M.J. Goeckner, A. Sra and L.J. Overzet
Direct liquid droplet injection for PECVD of flexible thin films.
2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, December 3, 2007

88    Gabriel Padron-Wells, Brandon Jarvis, Ashish K. Jindal, Matthew Goeckner
Development of Films for Bio-Compatible Electronics
UT Metroplex Day, UT Southwestern, Dallas TX February 15, 2008

89    Richard Pierce, Gabriel Padron-Wells, Brandon Jarvis, Matthew Goeckner
Preliminary Results From A Pulsed Hexane Plasma
UT Metroplex Day, UT Southwestern, Dallas TX February 15, 2008

90    D. Ogawa, I. Saraf, M.J. Goeckner, A. Sra and L.J. Overzet.
Direct liquid droplet injection for PECVD of organic thin films.
UT Metroplex Day, UT Southwestern, Dallas TX February 15, 2008

91    Thierry Dufour, Monali Mandra, Matthew Goeckner, Philippe Lefaucheux, Pierre Ranson(, Jeong-Bong Lee, Remi Dussart(, Lawrence Overzet
Ignition of parallel Micro Hollow Cathode Discharges in He without ballasts
61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13-17, 2008

92    Daisuke Ogawa, Iqbal Saraf, M. Goeckner,  L. Overzet
The affects of micro-droplet injection on low pressure plasmas
61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13-17, 2008

93    Caleb Nelson, Sanket Sant, Lawrence Overzet, Matthew Goeckner
Surface Control as a Function of Processing Conditions in an FC Plasma Environment
61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13-17, 2008

94    G. Padron-Wells, Brandon Jarvis, Ashish K. Jindal, M.J. Goeckner
Development of Bio-Compatible Films for Implantable Electronics
61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13-17, 2008

95    Iqbal Saraf, Daisuke Ogawa, Matthew Goeckner, Lawrence Overzet
Modeling the direct injection of binary liquid droplets into low-pressure environments and plasmas
61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13-17, 2008

96    PL Stephan Thamban, Daniel Self, Jimmy Hosch, Matthew Goeckner,
An e-Beam Source for Optical Emission Spectroscopy
61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13-17, 2008

97    G. Padron-Wells, I.C. Estrada-Raygoza, L.J. Overzet, M.J. Goeckner
Pulsed plasma polymerization of Ethylene Glycol for development of ultra thin biocompatible interfaces
62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20-23, 2009

98    Matthew Goeckner
Plasma surface interactions in fluorocarbon systems
62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20-23, 2009

99    Caleb Nelson, Iqbal Saraf, Lawrence Overzet, Matthew Goeckner
(C. Nelson won "Best Student Paper" Prize of the conference.)
Temperature Impact on Plasma-Surface Interactions in an FC Plasma Environment
62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20-23, 2009

100 Initial Studies of Deep Silicon Etch
Iqbal Saraf, Matthew Goeckner, Lawrence Overzet
62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20-23, 2009

101 Daisuke Ogawa, Lawrence Overzet, Matthew Goeckner
Plasma parameter variations during liquid droplet injection into low pressure plasmas
62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20-23, 2009

102 Monali Mandra, Lawrence Overzet, Matthew Goeckner, Thierry Dufour, Remi Dussart, Philippe Lefaucheux
Electrical characterization of Direct Current atmospheric pressure micro discharges using Radio frequency signal in Argon
62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20-23, 2009

103 M. Mandra, L. Overzet (presenting), M. Goeckner, J.-B. Lee, T. Dufour, R. Dussart, P. Lefaucheux, P. Ranson.
Recent work on Atmospheric Pressure MHCD at UTD in collaboration with GREMI.
2nd Workshop on Radio-Frequency Discharges, Presquile-de-Giens France, May 2009.

104 I. Saraf, M. Goeckner, L. Overzet
Fundamentals of Deep Silicon Etch
GRC Analog and Mixed Signal Devices Review, Austin, TX, June 2009.

104 T. Dufour, R. Dussart,  L. Overzet, M. Mandra, J.B. Lee, M. Goeckner, P. Lefaucheux, P. Ranson
Ignition and characterization of Micro Hollow Cathode Discharges in Helium.,
17th International Colloquium on Plasma Processes, Marseille France, June 2009.

105 I. Saraf, M. Goeckner, L. Overzet
Fundamentals of Deep Silicon Etch (Presentation and Poster)
SRC TECHCON 2009, Austin, TX, Sept. 2009.

106 R. Dussart, T. Dufour, L. Overzet, M. Mandra, J.B. Lee, M. Goeckner, L. Pitchford, N. Sadeghi, P. Lefaucheux, P. Ranson
Experiment and Simulation Results of Limited Cathode Area MHCDs Operating in He,
AVS 56th International Symposium & Exhibition, San Jose CA, Nov. 2009. 


 Additional Information
HelpHelp  
Professional recognitions, honors, memberships etc., (study, teaching, research service)
  • Member American Society of Mechanical Engineers
  • Program Evaluator - ABET
  • Chair, Trans-pacific workshop of Flexible electronics, Dallas, TX
  • Erik Jonnson School of Engineering and Computer Science Outstanding Service Award
  • Visiting Professor, Sungkyunkwan University, Suwon, South Korea
  • Member of the Chemical Physical Society
  • Member of the American Society for Engineering Education (Break from 04-06)
  • Local organizing committee, GEC Dallas TX 08
  • Local Organizing Committee - ICMI Conference Austin, TX
  • Local organizing committee, ICMI Austin TX 06
  • Program committee Plasma Science Div. AVS Conf. 06
  • Senior Member of the IEEE
  • Local organizing committee, International Plasma Based Ion Implantation Conference 03
  • The Greater-Southwest Implant Users Group Executive Committee.
  • Host of The Greater-Southwest Implant Users Group meeting Aug. 15, 2000 at UTD.
  • Executive Committee member Plasma Science and Technology Division, AVS
  • Student Prize - AVS, Plasma Science and Technology Division
  • Member of the IEEE
  • Member of the American Physical Society
  • Member of the American Vacuum Society (AVS)
  • Membership Physics Honor Society (Sigma Pi Sigma)
  • William C. Ballowe Sr. Award (Top senior in physics)
  • Membership Mathematics Honor Society (Pi Mu Epsilon)

University Committees (Non-dissertation / thesis / qualifying exam)
  • State wide
    • THECB committee on "2+2" Mechanical Engineering
    • University wide
    • Committee on Effective Teaching (co-Chair)
    • Undergraduate curriculum alignment committee (Chair)
    • Gateways to Excellence in Math and Science (GEMS) committee
    • Quality Enhancement Program (=> GEMS) committee
    • Safety Committee (Chair)
    • Faculty Senate
  • Erik Jonsson School wide
    • Academic Affairs Committee - Dean's representative
    • Strategic Plan - Undergraduate Education subcommittee (Chair)
    • Joint program Undergraduate curriculum committee (Organizer)
    • Clean room committee
  • Mechanical Engineering
    • Undergraduate curriculum/steering committee (Nominal chair)
    • Mechanical Engineering Hiring Committee
  • Electrical Engineering
    • Faculty Search Committee (Chair Engineering Education subcommittee)
    • Electrical Engineering Undergraduate curriculum committee (Chair)
    • Graduate Admission Committee (Chair)
    • Honors Committee
    • Faculty Search Committee (03-04 Chair Microelectronics subcommittee)
    • Clean room committee
    • Graduate Admissions Committee
    • Undergraduate Education Committee

Administration and curricular development, etc
  • Develop new plasma classes and laboratories (2000-2001)
  • Seek funding to develop new micro-devices processing lab (2000 and 2001)
  • Undergraduate curriculum committee (1999-2000)
  • Graduate admissions committee (2000-2004)
  • Chair Graduate admissions committee (2004)
  • Faculty Senate (2003-2004)
  • Cleanroom committee (2000- 2006)
  • Jan Van der Ziel equipment disposal committee (2001)
  • Undergraduate honors track committee (2001-2007)
  • Microelectronics Faculty Search committee (2000-2003)
  • Jan Van der Ziel fellowship committee (2005 - Present)
  • Chair Undergraduate curriculum committee (2006 - Present). This committee is in the process of completely redoing the UG EE curriculum
  • Quality Enhancement Program (2007-2008)
  • Gateways to Excellence in Math and Science (2008-Present)

Service - reviewing, refereeing and administrative work with professional societies and organizations; departmental, college, university committees; community service, etc
  • Co-Local Secretary: 61st Gaseous Electronics Conference, Addison Texas, Oct, 2008
  • Local Chair: 2008 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, Oct, 2008
  • Local Chair: 2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, December 3, 2007
  • Member: International Organizing committee 5th International Symposium on Advanced Plasma Processes and Diagnostic & 1st International Symposium on Flexible Electronics April 2007 - Suwon, Korea
  • Member: Local Organizing committee Gaseous Electronics Conference 2008 - Dallas TX
  • Reviewed SBIR proposals for NSF
  • Reviewed 'DoE Lab' proposals for DoE
  • Reviewed papers for Plasma Sources Science and Technology
  • Reviewed papers for IEEE Transactions on Plasma Sciences
  • Reviewed papers for J. Vacuum Science and Technology A
  • Reviewed papers for J. Vacuum Science and Technology B
  • Elected Member: Executive Committee of Plasma Science and Technology Division of American Vacuum Society (1998-2001)
  • Member: Abstract selection committee Plasma Science and Technology Division of American Vacuum Society (Most years after ~96)
  • Member: Abstract selection committee Manufacturing Science and Technology Division of American Vacuum Society (2000)
  • Member: Local organizing committee Plasma Based Ion Implantation Conference 2002 (San Antonio, TX).
  • Coordinated Plasma Science and Technology Seminar series, Princeton Plasma Physics Lab (1995-97)
  • Coordinated Plasma Science Seminar series, University of Texas at Dallas (2000-2001)
  • Session moderator: Gaseous Electronics Conference, Houston TX 2000
  • Member: Program committee Plasma Science and Technology Division of American Vacuum Society (2005)
  • Member: Local Organizing committee ICMI 2005 (for ICMI in Austin in 2006)
  • Founder and coordination board: Texas Semiconductor Processing Users Group (2005 - Present)
  • Member UTD Quality Enhancement Plan committee (2007 - 2008)

Please verify the information in this request and mention any changes or suggestions in the comments section. Email notifications and confirmations regarding this will be sent to you at fromEmail and the profile owner. If you would like to receive it at a different email address, please change the email address listed on your profile.
From:
Comments:
© 2014-2015 The University of Texas at Dallas About Explorer | Accessibility | Contact Explorer Team