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Lawrence J. Overzet
Associate Department Head-Electrical Engineering, Professor-Electrical Engineering
Contact Address   800 W. Campbell Road, Richardson, TX 75080-3021     Office MailstopMail Box: RL10, Room No.: NSERL 3.404 
Email Address    Primary Phone Number 972-883-2154    Fax Number (972)883-6839    URL Faculty Homepage    Media Contact
 Professional Preparation
 Ph.D.Electrical EngineeringUniversity of Illinios1988
 M.S.Electrical Engineering University of Illinios1986
 B.S.Electrical Engineering University of Illinios1983
Collapse Section Expand Section Research and Expertise
Research Interests
The primary focus of my research is on the plasmas used in semiconductor device manufacturing. The research is primarily experimental in nature although I have performed some plasma simulations and will be doing it more. In particular, my group is best known for our research into pulsed plasmas and ion-ion plasmas. Pulsed-plasmas have the plasma source turned on-and-off periodically, while ion-ion plasmas have only positive and negative ions in them and no electrons. Both have significant advantages over continuous electron-ion dominated plasmas. I and my students have developed several diagnostics for studying these plasmas and consequently have extensive experience in determining plasma kinetics.  These projects have been supported by the NSF, DoE, State of Texas, and several companies.   2009 projects include work for SRC (Deep Si Etch), Photronics (Mask etch) and DoE (Micro-Misted plasmas).
Collapse Section Expand Section Publications
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  YearPublication  Type
"Tuning of Fe catalysts for growth of spin-capable carbon nanotubes." J.-H. Kim, H.-S. Jang, K. H. Lee, L. J. Overzet, G. S. Lee, Carbon 48, 538-47 (2010).
Peer reviewed
"Transient effects caused by pulsed gas and liquid injections into low pressure plasmas." D. Ogawa, C. Chung, M. Goeckner  and L. Overzet, Plasma Sources Sci. Technol. 19 034013 (2010) (11 pp.) 
Category: Plasma Sources Science and Technology
Peer reviewed
"The Direct Injection of Liquid Droplets into Low Pressure Plasmas." D. Ogawa, I. Saraf, A. Sra, R. Timmons, M. Goeckner and L. Overzet, J. Vac. Sci. Technol. A 27, 342-351 (2009). Also selected for the March 16, 2009 issue of Virtual Journal of Nanoscale Science & Technology.  Access the Virtual Journal at

Category: Journal of Vaccuum Science and Technology A
Peer reviewed
"Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model." S. P. Sant, C. T. Nelson, L. J. Overzet, and M. J. Goeckner, J. Vac. Sci. Technol. A 27, 631- 42 (2009).
Peer reviewed
"Progress report: Direct injection of liquids into low-pressure plasmas."  M. Goeckner, D. Ogawa, I. Saraf and L. Overzet, Journal of Physics: Conference Series 162, 012014 (2009) (9 pp.).
Peer reviewed
Collapse Section Expand Section Presentations and Projects
Start DateEnd DatePresentation/Project
Nov 2005 Nov 2005 In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma.
"In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma." L. Overzet, M. Goeckner, E. Joseph, B. Zhou and S. Sant, Dry Process Symposium, Jeju Island Korea, Nov. 2005.
Nov 2005 Nov 2005 Carbon nanotube (CNT) growth using an atmospheric pressure plasma jet process and initial device test
May 2004 May 2004 Plasma Science Research at UTD: From Fluorocarbons to CNTs
"Plasma Science Research at UTD: From Fluorocarbons to CNTs." L. Overzet, M. Goeckner and G.-S. Lee. University of Orleans - GREMI seminar. Orleans, France May 2004
Feb. 2007 Feb. 2007 Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites.
"Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites." L. Overzet, M. Goeckner, D. Ogawa, I Saraf, R. Timmons and S. Sanchez. SPRING IV Conference, U. Houston, Houston TX Feb. 2007.
"Oct. 22, 2006" "Oct. 25, 2006" Filling of Carbon Nanotube Forests Grown by Atmospheric Pressure PECVD
Collapse Section Expand Section Appointments
DurationRankDepartment / SchoolCollege / OfficeUniversity / Company
Sept. 1988-Sept. 1994Assistant Professor Erik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
1994-presentAssociate ProfessorElectrical EngineeringErik Jonsson School of Engineering and Computer ScienceUniversity of Texas at Dallas
       Teaching HelpHelp  
 Additional Information
"Consulting, Patents, Etc."
  1. Consultant on Plasma Based Semiconductor Cleaning Technologies and Liaison to the Sandia National Laboratories CRADA Team, Sept.-Dec. 1999, Beta Squared Incorporated, Allen TX.
  2. Patents:
    1. High Density Plasma Source for Semiconductor Processing. # 6,028,285.
    2. Plasma Apparatus for Ion Energy Control. # 6,097,157.
    3. Transmission Line Based Inductively Coupled Plasma Source with Stable Impedance. # 6,459,066
    4. Particle Contamination Cleaning from Substrates Using Plasmas, Reactive Gases, and Mechanical Agitation. #6,676,800.
    5. Ion-Ion Plasma Processing with Bias Modulation Synchronized to Time-Modulated Discharges. #6,875,700

Honors and Awards
  1. Honorary Member in the Golden Key International Honour Society (10/07).
  2. Polykarp Kusch Lecturer for UTD 2005.

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